Wafer Probing

Tasks

The optical circuits arranged on the SiPh (Silicon Photonics) wafer must also be tested in many cases. For this purpose a centrally arranged XY-table is used to transport the wafer. Although the test tool also has several degrees of freedom in many cases, it is not able to cover the complete wafer surface.

Solution

A customer-specific XY system is used around which several test stations can be arranged to increase throughput. Rough positioning is done by the XY table, fine positioning is done in several 6DoF alignment systems.

Benefits

• Standard axes for Pick&Place tasks
• Customized solutions in all accuracy classes
• Development and production of the XY-table with the complete base
• The integrated high-resolution measurement system allows a high stability in position, with a jitter of a few nm